11000 Series Pneumatic with Copper Bonnet Seal

Viton Bonnet / Viton Gate Seals

UHV: Copper / Viton® elastomer

Bakeout Temperature

Metal sealed bonnet
 - Valve open: 200°C
 - Valve closed: 150°C
Actuator
 - Manual: 60°C
 - Pneumatic: 60°C

Mounting Position

Any

Cycles Until Service

1,000,000 cycles

Vacuum

Pressure Range
 - UHV: 1×10-¹⁰ mbar
Helium leak rate: <2x10-¹⁰ mbar l/s
Differential pressure closed: 1 bar in either direction
Maximum Δ pressure before opening: ≤30 mbar

Mechanism

Pneumatic air service: 80 psig
Solenoid: 4.0 Watts
 - supplied voltage: 120V AC, 50/60 Hz
 - optional voltages: 24, 200, 240 VAC 50/60 Hz or 12, 24V DC
Position indicator, max: 115 VAC or 28 VDC, 20 mA