88200 Series
The 88200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers.
Standard Technical Specifications
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MaterialsValve body and gate: 6061-T6 Aluminium
Welded bellows shaft seal: AM-350
Driveshaft and pins: Hardened stainless steel
Bonnet/gate seals: Viton® elastomer -
Bakeout Temperaturewithout solenoid
Elastomer sealed bonnet: 150°C
Actuator: 60°C -
Mounting PositionAny
-
Cycles Until Service1,000,000 cycles
dependent on process -
VacuumPressure Range: 1×10-9 mbar
Helium leak rate: <2×10-9 mbar I/s
Differential pressure closed: 1 bar in either direction
Maximum ? pressure before opening: < 30 mbar -
MechanismPneumatic air service: 80 psig
Solenoid: 4.3 Watts
(latching-type, Valve to remain in same position in the event of power loss)
- supplied voltage: 120V AC, 50/60 Hz)
- optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC)
Position indicator, max: 115 VAC or 28 VDC, 20 mA
28200 Series
The 28200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers.
Standard Technical Specifications
-
MaterialsValve body and gate: 304 stainless steel
Welded bellows shaft seal: AM-350
Driveshaft and pins: Hardened stainless steel
Bonnet/gate seals: Viton® elastomer -
Bakeout Temperaturewithout solenoid
Elastomer sealed bonnet: 150°C
Actuator: 60°C -
Mounting PositionAny
-
Cycles Until Service1,000,000 cycles
dependent on process -
VacuumPressure Range: 1×10-9 mbar
Helium leak rate: <2×10-9 mbar I/s
Differential pressure closed: 1 bar in either direction
Maximum ? pressure before opening: < 30 mbar -
MechanismPneumatic air service: 80 psig
Solenoid: 4.3 Watts
(latching-type, Valve to remain in same position in the event of power loss)
- supplied voltage: 120V AC, 50/60 Hz)
- optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC)
Position indicator, max: 115 VAC or 28 VDC, 20 mA
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