21700 Series Stainless Steel 3-Position Gate Valves
The 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. These valves may also be utilized to smooth the transition from rough to high vacuum. The valves employ two pneumatic solenoids and an air pressure regulator to achieve the three positions of fully open, fully closed, and an adjustable third position. One solenoid controls the fully open and fully closed positions while a second solenoid controls the third position.
Standard Technical Specifications
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MaterialsValve body and gate: 304 stainless steel
Welded bellows shaft seal: AM-350
Drive shaft and pin: Hardened stainless steel -
VacuumPressure Range: 1×10-9 mbar
Helium leak rate: <2×10-9 mbar I/s
Differential pressure closed: 1 bar in either direction
Maximum Δ pressure before opening: <30 mbar -
MechanismPneumatic air service: 80 psig
Solenoid: 4.0 Watts
- supplied voltage: 120V AC, 50/60 Hz
- optional voltages: 24, 200, 240 VAC 50/60 Hz
Position indicator, max:
- Reed switch for open & closed: 115 VAC or 28 VDC, 20 mA
- Microswitch for third position: 115 VAC, 5 A
- optional voltages: 250 VA, 5 A or 28 VDC, 5 A resistive load 28 VDC, 3 A inductive load -
Cycles1,000,000 cycles
Cycles until service: dependent on process -
Bonnet/gate sealsHV: Viton® elastomer
Helium leak rate: <2×10-9 mbar l/s
Differential pressure closed: 1 bar -
TemperatureBody: 150°C
Actuator: 60°C -
Mounting PositionAny
| DN | Model Number | KF/ISO-F 3 (Bolted) | ISO-K 6 (Clamped) | CF-F* 0 or 4 (Conflat) | ||||
|---|---|---|---|---|---|---|---|---|
| 100 | 4.00 | 21712-040_R | Quote | Quote | Quote | |||
| 160 | 6.00 | 21712-060_R | Quote | Quote | Quote | |||
| 200 | 8.00 | 21712-080_R | Quote | Quote | Quote | |||
| 250 | 10.00 | 21712-100_R | Quote | - | - | Quote | ||
| 320 | 12.00 | 21712-120_R | Quote | - | - | Quote | ||
Flange Types
- 0 = CF-F Port with UNF Thread (21712-0400R)
- 3 = KF/ISO-F Bolted (21712-0403R)
- 4 = CF-F Port with Metric Thread (21712-0404R)
- 6 = ISO-K Clamped (21712-0406R)
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To obtain 2D drawings (PDF), 3D drawings (STP), and to request a quote follow the links below
775.359.4442