21200 Series Stainless Steel Million Cycle Gate Valves
The 21200 Series Million Cycle Gate Valves are designed for high vacuum applications specifically when pressure ranges approximate 1 x 10-9 mbar and bakeout temperatures do not exceed 150°C. There are no mechanical locks inside vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate generation and providing smoother actuation. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, high cycle, low outgassing valves.
Standard Technical Specifications
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MaterialsValve body and poppet: 304 stainless steel
Welded bellows seal: AM-350
Driveshaft and pins: Hardened stainless steel
Bonnet/gate seals: Viton® elastomer -
Bakeout Temperaturewithout solenoid
Elastomer sealed bonnet: 150°C
Actuator: 60°C -
Mounting PositionAny
-
Cycles Until Service1,000,000 cycles
dependent on process -
VacuumPressure Range: 1×10-9 mbar
Helium leak rate: <2×10-9 mbar I/s
Differential pressure closed: 1 bar in either direction
Maximum Δ pressure before opening: ≤30 mbar -
MechanismManual: hand crank
Pneumatic air service: 80 psig
Solenoid: 4.0 Watts
- supplied voltage: 120V AC, 50/60 Hz
- optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC
Position indicator, max: 115 VAC or 28 VDC, 20 mA
| DN | Model Number | KF/ISO-F 3 (Bolted) | ISO-K 6 (Clamped) | CF-F* 0 or 4 (Conflat) | ||||
|---|---|---|---|---|---|---|---|---|
| 16 | 0.625 | 21212-006_ | Quote | - | - | Quote | ||
| 40 | 1.50 | 21212-015_R | Quote | - | - | Quote | ||
| 50 | 2.00 | 21212-020_R | Quote | - | - | Quote | ||
| 63 | 2.50 | 21212-025_R | Quote | Quote | Quote | |||
| 80 | 3.00 | 21212-030_R | Quote | Quote | Quote | |||
| 100 | 4.00 | 21212-040_R | Quote | Quote | Quote | |||
| 160 | 6.00 | 21212-060_R | Quote | Quote | Quote | |||
| 200 | 8.00 | 21212-080_R | Quote | Quote | Quote | |||
| 250 | 10.00 | 21212-100_R | Quote | - | - | Quote | ||
| 320 | 12.00 | 21212-120_R | Quote | - | - | Quote | ||
Flange Types
- 0 = CF-F Port with UNF Thread (21212-0400R)
- 3 = KF/ISO-F Bolted (21212-0403R)
- 4 = CF-F Port with Metric Thread (21212-0404R)
- 6 = ISO-K Clamped (21212-0406R)
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To obtain 2D drawings (PDF), 3D drawings (STP), and to request a quote follow the links below
775.359.4442